The system is fully PC controlled and programmable for automatic operation and data reporting. The integral differential turbo-molecular pump ensures that the spectrometer continues to operate within a UHV environment through process pressures up to 1 mbar. The close-coupled reentrant sample extractor tube is inserted directly into the process environment for fast response to status changes in the gas composition. The system mounts directly to the process chamber. It addresses vacuum coating, plasma etching, sputter deposition, chemical vapor deposition and metalorganic CVD, and reactive-ion etching. The compact Hiden HPR-30 differentially pumped mass spectrometer enables real-time measurement and control of gas composition in vacuum processes in the pressure regime 1 mbar to 10 −7 bar. Data Translation Inc, 100 Locke Drive, Marlboro, MA 01752-1192, Other software support includes drivers and interface tools for LabVIEW and MATLAB programming. The module samples at 960 Hz, uses a 24-bit sigma-delta analog-to-digital converter to eliminate aliasing, and provides four isolated digital inputs and four open-collector digital outputs for notifications or control. No other circuitry or external components are needed.

A sensor simply has to be connected at an input, and all selections-for example, those necessary for excitation, cold junction compensation, and bridge completion-are supported by QuickDAQ software. Box 4047, Stamford, CT 06907-0047, ĭata Translation’s new data acquisition module DT9829 supports a broad array of sensor types that includes thermocouples, resistance temperature detectors, and thermistors for measuring temperature bridge-based and strain gauge sensors for measuring strain and load cell data, such as torque and pressure and voltage, current, and resistance sensors for measuring electrical parameters. Omega Engineering Inc, One Omega Drive, P. It is suitable for those who use thermal mass flow meters or controllers on a variety of gases, who need to change gas type frequently, or who must re-range while preserving gas measurement and control accuracy.

According to Omega, that makes the series among the most accurate and flexible mass flow designs available.

To establish correction functions that account for both thermal and physical differences among gases, the FMA7400/7500 database is built on thousands of native gas runs. The new series is designed to overcome a long-standing limitation that many thermal mass flow units have when changing gas types: A simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for viscosity and density differences. Omega Engineering now offers FMA7400/7500 elastomer-seal and FMA7400/7500-SS metal-seal thermal mass flow meters and controllers for gas-flow measurement and control.

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